ERIC Number: EJ170555
Record Type: Journal
Publication Date: 1977
Pages: N/A
Abstractor: N/A
ISBN: N/A
ISSN: N/A
EISSN: N/A
Available Date: N/A
Perfluoropolyethers as Vacuum Pump Fluids
Laurenson, L.
Research Development, 28, 11, 61-72, Nov 77
Discusses the state of the art in the field of utilizing perfluoropolyethers in the creation of "clean" vacuums, when the term "clean" vacuum defines one that does not contain contaminates which interfere with the process to be carried out in the vacuum. (SL)
Publication Type: N/A
Education Level: N/A
Audience: N/A
Language: N/A
Sponsor: N/A
Authoring Institution: N/A
Grant or Contract Numbers: N/A
Author Affiliations: N/A
