This research explores how motivation and online learning self-efficacy (OLSE) act as mediators in the association between information and communication technology (ICT) literacy and deep learning within the context of online English as a foreign language (EFL) education. A sample of 372 participants were recruited on a voluntary and anonymous basis from a public university in northern China for this study. Confirmatory factor analysis (CFA) was employed to evaluate the reliability and validity of the questionnaires. Subsequently, structural equation modeling (SEM) was conducted to examine the hypothesized model, with both CFA and SEM conducted with AMOS 29.0. The results reveal that ICT literacy, motivation, and OLSE positively and directly predict deep learning in online education. Additionally, ICT literacy also positively predicts deep learning indirectly with motivation and OLSE being significant mediators. The findings underscore the importance of ICT literacy, motivation, and OLSE for EFL learners to achieve deep learning in online EFL education. Drawn from these findings, pedagogical implications for alleviating EFL learners' online deep learning were provided.