Research Ethics is a key element of Responsible Research and Innovation (RRI). In spite of an increased interest in this topic there is little empirical evidence about scientists' practice and perception of Research Ethics. Drawing on a large-scale survey among 4,180 European researchers we present unique insights into Research Ethics activities, researchers' motivation for ethical behavior, the perceived barriers and benefits as well as the role of institutional support. According to the survey results, most researchers consider ethical issues in their research projects and see it as part of good research practice or are convinced that research must be ethical. Perceived benefits of Research Ethics are higher quality of scientific outputs, higher social relevance of research, increased societal impact and a changed approach to risk. Barriers to ethics activities are particularly seen in the absence of institutional support and incentives. With regard to institutional support, we show that offers and infrastructures of Research Performing Organisations for Research Ethics are not well known among the employed researchers in general. Through a regression analysis about the influence of institutional support on Research Ethics we see at the same time that the provision of an Ethics team that researchers can address and the existence of a policy for designing ethical values and principles into research practice have a positive influence on researchers to engage in Research Ethics activities. The results underlines the importance of low-threshold services and personal contacts for researchers with ethical questions.